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Superconducting Multilayer Technology for Josephson Devices : Technology, Engineering, Physics, Applications


Author: Meckbach, Johannes Maximilian
Source: Directory of Open Access Books
Publisher: KIT Scientific Publishing
ISBN: 9783731501220
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Description
Within this book fabrication processes for high-quality Josephson junctions based on niobium and aluminum oxide as well as niobium nitride and aluminum nitride on various substrates are discussed. Techniques for achieving a planar chip topography and sub-µm lateral dimensions, aiding the realization of sophisticated Josephson devices such as SQUIDs, flux-flow oscillators and long Josephson junctions with artificial phase discontinuities, are presented in detail.